Integrating vertically aligned carbon nanotubes on micromechanical structures
نویسندگان
چکیده
We present preliminary results on a microfabrication approach to enable the integration of high yield, uniform, and preferential growth of vertically aligned carbon nanotubes ~VACNTs! on low-stress micromechanical structures using a combination of ‘‘electron-beam crosslinked’’ poly~methylmethacrylate! surface nanomachining and direct current plasma enhanced chemical vapor deposition of electric-field-aligned carbon nanotubes. In this article, selective placement of high yield and uniform VACNTs on a partially suspended Ni/SiO2 /Ti microstructure has been demonstrated. © 2003 American Vacuum Society. @DOI: 10.1116/1.1591743#
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